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mpo 100„1 – 10 – 100 – 1000 – Achievable component hehts of over 1 cm, surfaces with roughness in the order of 10 nm, structure sizes of less than 100 nm, and writing speeds over 1000 mms: At the SPIE Photonics West in„1 – 10 – 100 – 1000 – Achievable component hehts of over 1 cm, surfaces with roughness in the order of 10 nm, structure sizes of less than 100 nm, and writing speeds over 1000 mms: At the SPIE Photonics West in