api 5000• API 5000™ LCMSMS System • Turbo V™ source with ESI probe • Gas and source parameters: CUR: 20 psi, GS1: 40 psi, GS2: 40 psi, TEM: 350°C, CAD: 7, IonSpray voltageAPI-5000 Advanced Photomask Inspection System for sub-wavelength lithography is a hh